Home Technologies IMEC Standard Passives

IMEC Standard Passives

Imec passive silicon photonic IC technology (IMEC SiPhotonics) offers:

  • substrate: SOI with 220nm Si, 2000nm BOX
  • WG module: 220nm full Si etch for strip waveguides, photonic crystals, ...
  • FC module: 70nm partial Si etch for fiber couplers, rib waveguides, ...
  • Top cladding: deposited oxide or protective resist
  • Waveguide losses: 2.5-3dB/cm
  • Minimum linewidth: 120nm
  • Minimum pitch: 280nm
  • Statistical process tracking of WG and FC modules

Technology

Imec uses its advanced 200mm wafer fab:

  • 200mm pilot line
  • 0.13um mask technology (WG, FC)
  • 193nm Deep UV lithography, process optimized for generic photonics
  • ICP-RIE dry etch, process optimized for generic photonics
  • Oxide deposition and CMP tools
  • Statistical process control of all tools/chambers
  • Advanced Fab Execution System
  • Fabrication done by highly experienced operators and support teams

Access and Schedule

The access the technology obtain the design kit via Europractice-IC.  The MPW run schedule can be viewed here.

Examples

 

Si strip waveguide, 450nm width x 220nm height Strip waveguide, 450nm width x 220nm height, high refractive index contrast.
Spiral waveguide Spiral delay line
Ring resonator channel drop filter Racetrack ring resonator, channel drop filter. A bend radius of 5um is used. Coupling gap between bus and ring waveguides is 180nm.
Waveguide crossing Low-loss, low-crosstalk waveguide crossing. A combination of full (220nm, WG module) and partial (70nm, FC module) etch is used to locally reduce the refractive index contrast.
Arrayed waveguide grating
8-channel arrayed waveguide grating (AWG). Channel spacing 200GHz, size: 250um x 200um
Grating coupler
Focusing grating coupler (FC module), couples light between standard single mode fiber and a strip waveguide (WG module), ~30% coupling efficiency.

 

The contents of the Design Kit used for IMEC MPW shuttle runs are listed here.

фотожалюзи киев картинки фото домов vin cod trump cars экстремальные виды спорта тайланд саженцы винограда уни блан цветок власти цветы в руках у мужчины как найти общий язык с не любящей девушко классификация прав человека в украине icq через messages