ePIXfab presently offers the following technologies in MPW:
- CEA-LETI Full Platform
- imec Full Platform
- IMEC standard passives
- LETI standard passives
- IMEC advanced passives
- IHP Passives
- LETI standard passive and heater module
- IMEC modulators
- LETI photodetectors
These are all 200mm wafer technologies. Through the ePIXfab offer, academic and industry researchers can prototype very advanced devices including passive, fiber I/O and novel and high-performance active devices.
if you would like to know more about the Deep UV Lithography process used for processing wafers in the CMOS photonics platform click here.