IMEC offers its passive silicon photonics process in ePIXfab, described in detail on the IMEC passive technology specification page.

The Photonics Research Group of Ghent University - IMEC has demonstrated a wealth of devices based on the silicon photonics platform:

• Low-loss waveguides
• Splitters, couplers and waveguide crossings
• Mach-Zehnder interferometers, ring resonators and Arrayed waveguide gratings
• Biosensors
• Integration with III-V sources and detectors

Further sources of information:

• Photonics group website: publications
• Contact Wim Bogaerts

The devices are processed in IMEC's 200mm pilot line, which runs .13um CMOS (with capability down to 90nm), MEMS, silicon photonics, and other technologies.

This is a fabrication line similar to an industry R&D line:

• It operates continuously, 24/7
• A trained operator force is in charge of fabrication
• The fab has dedicated support and development teams
• A manufacturing execution system governs the whole fab
• Strict contamination control is done
• Statistical process control (SPC) is executed on the tools

The IMEC 200mm fab capabilities are high-end:

• Wafer scale R&D, prototyping and small-volume on 200mm wafer size
• 193nm deep UV, 248nm deep UV and i-line lithography
• Dry and wet etching, deposition, CMP, ....
• Wafer grinding and dicing
• High-end metrology and material analysis
• ...

IMEC's CMORE service is ideally suited to help you with requirements beyond what IMEC offers in ePIXfab:

• more advanced processes
• on-demand development
• prototyping
• low-volume manufacturing